LDMOS Device and Method of Fabrication

ABSTRACT

An LDMOS device and method of fabrication are provided. The LDMOS device has a substrate with a source region and a drain region formed in the substrate. An insulating layer is provided on a portion of the substrate between the source and the drain region, such that a planar interface is provided between the insulating layer and a surface of the substrate. An insulating member is then formed on a portion of the insulating layer, and a gate layer is formed over part of the insulating member and the insulating layer. By employing such a structure, it has been found that a flat current path exists which enables the on-resistance to be decreased while maintaining a high breakdown voltage.

RELATED APPLICATIONS

This application is a division of U.S. patent application No.11/100,688, filed 7 Apr. 2005, which claims the benefit of U.S.Provisional Application No. 60/590,305 filed 22 Jul. 2004. All of theseidentified applications are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to semiconductor devices, andmore particularly to a lateral double diffused metal oxide semiconductor(LDMOS) device and a method of fabricating such a device.

2. Description of the Prior Art

LDMOS devices are typically used in high voltage applications, and whendesigning such LDMOS devices, it is important that the device shouldhave a very high breakdown voltage (V_(bd)), while also exhibiting, whenoperating, a low on-resistance (Ron). By designing LDMOS devices withlow on-resistance and high breakdown voltage, such devices willtypically exhibit low power loss in high voltage applications. Inaddition, by exhibiting a low on-resistance, a high drain current(Idsat) can be achieved when the transistor is in saturation. Oneproblem when designing such LDMOS devices is that techniques andstructures that tend to maximise V_(bd) tend to adversely affect the Ronand vice versa.

It is well known in the art to seek to increase the breakdown voltage byproducing a field oxide (FOX) underlying a portion of the gate (thisportion of the gate being referred to as the field plate), the FOX layerreducing electric field crowding at the gate edge. FIG. 1 is across-sectional view of such a conventional LDMOS device 100. Asillustrated in FIG. 1, drain region 106 is formed within an N well 104and source region 108 is formed within a P-substrate 102. A gate 110 isformed on the surface of the substrate, one portion of which isseparated from the substrate by a thin insulating oxide layer. A FOXlayer 112 is formed between the substrate 102 and a further portion ofthe gate 110. The FOX layer consumes silicon in the substrate as it isformed, the formation of the FOX layer typically being via a thermaloxidation process.

U.S. Pat. No. 6,448,625 B, U.S. Pat. No. 6,468,870 B, U.S. Pat. No.6,531,355 B and U.S. Pat. No. 6,580,131 B illustrate various designs ofMOS and LDMOS devices which incorporate such a FOX layer.

U.S. Pat. No. 6,441,431 B describes an LDMOS device in which adielectric insulating layer is formed between the gate and the substratehaving two portions of different thicknesses. The formation of thisdielectric insulating layer with two different thickness portions isdiscussed at column 4 of that document. As discussed at column 4, lines48 to 60, preferably both portions of the dielectric layer are comprisedof the same material and are formed using a thermally grown silicondioxide layer.

While the prior art techniques such as those discussed above provideinsulating layers which seek to increase the breakdown voltage of thedevice, it would be desirable to further improve the trade off betweenhigh breakdown voltage and reduced on-resistance. In particular it wouldbe desirable to enable the on-resistance to be further reduced within adevice exhibiting a particular breakdown voltage.

SUMMARY OF THE INVENTION

Viewed from a first aspect, the present invention provides a lateraldouble diffused metal oxide semiconductor (LDMOS) device, comprising: asubstrate; a source region and a drain region formed in the substrate;an insulating layer provided on a portion of the substrate between saidsource region and said drain region, such that a planar interface isprovided between said insulating layer and a surface of the substrate;an insulating member formed on a portion of said insulating layer; and agate layer formed over part of said insulating member and saidinsulating layer.

The inventors of the present invention realised that in the known priorart designs which incorporate a FOX layer, the fact that the lowersurface of the FOX layer is below the lower surface of the adjacent thinoxide insulating layer means that the current path near the interfacebetween the substrate and the insulating layer will exhibit a recesscurrent path due to the current needing to deviate to follow the contourof the lower surface of the FOX layer. Further, when that current pathchanges from the underside of the thin insulating layer to the undersideof the FOX layer, the inventors realised that the current spreadingresistance will increase. Both of these factors cause an increase in theon-resistance.

Having recognized that a recess current path will form near theinterface between the insulating layer and the substrate, and that anincreased spreading resistance would also occur near that interface, theinventors of the present invention have designed an LDMOS device wherean insulating layer is provided on a portion of the substrate betweenthe source region and the drain region, that has a planar interfacebetween it and the surface of the substrate. Then, in order to achievean increase in the breakdown voltage, the inventors of the presentinvention have provided an insulating member that is formed on a portionof the insulating layer in order to provide a thicker insulating region,and a gate layer is then formed over part of the insulating member andthe insulating layer. Hence an LDMOS device can be produced whichexhibits a high breakdown voltage, and due to the planar interfacebetween the insulating layer and the surface of the substrate, adecrease in on-resistance can also be obtained.

In one embodiment the insulating member is formed on the insulatinglayer via a deposition process. By depositing the insulating member ontothe insulating layer, the planar interface between the insulating layerand the surface of the substrate is not disturbed.

In such embodiments of the present invention, the insulating member maybe formed by performing a sequence of deposition, lithography andetching steps in order to produce the insulating member on a portion ofthe insulating layer.

In one embodiment, the LDMOS device further comprises a anotherinsulating member, such as a spacer formation, located adjacent at leastone side wall of the insulating member to form a transition surface forthe gate layer between the insulating layer and the insulating member.The transition surface of the spacer formation serves to smooth thetransition of the gate layer between the insulating layer and theinsulating member, which serves to reduce the electrical field in thisportion of the gate and thus increase breakdown voltage.

In one embodiment, said substrate is of a first conductivity type, andsaid source region and said drain region are of a second conductivitytype opposite to said first conductivity type, the device furthercomprising: a first well region of said second conductivity type formedin the substrate, one of said drain region and said source region beingformed inside said first well region; and the first well region beinglocated such that the portion of said insulating layer upon which saidinsulating member is formed overlies the first well region. In oneparticular embodiment, the drain region is formed within the first wellregion, and a doping profile of the first well region is used to act asa double diffused drain. Such a configuration assists the device insustaining high voltage.

In one embodiment, the LDMOS device further comprises: a channel regionformed in the substrate below the insulating layer; and a second wellregion of said first conductivity type formed in the substrate toprovide a doping concentration for said channel region. Accordingly, arequired threshold voltage can be achieved by adjusting the dopingconcentration of the second well region.

In one embodiment, the second well region surrounds the first wellregion. However, in alternative embodiments the second well region canbe separate from the first well region, rather than encompassing it.

The insulating layer may be formed from a variety of materials. However,in one embodiment the insulating layer is formed of silicon dioxide.

In one embodiment the insulating member comprises a dielectric material.As examples, the dielectric material may be one of silicon nitride,silicon oxynitride and silicon enriched oxide.

The spacer formation may be formed of an insulating material, and as anexample that insulating material may be one of silicon oxide, siliconnitride and silicon oxynitride. In one particular embodiment, theinsulating member is formed of silicon nitride and the spacer formationis formed of silicon oxide.

Viewed from a second aspect, the present invention provides a method offabricating a lateral double diffused metal oxide semiconductor (LDMOS)device, comprising the steps of: (a) providing a substrate; (b) formingan insulating layer on a portion of the substrate, such that a planarinterface is provided between said insulating layer and a surface of thesubstrate; (c) forming an insulating member on a portion of saidinsulating layer; (d) forming a gate layer over part of said insulatingmember and said insulating layer; and (e) forming a source region and adrain region in the substrate such that said portion of the substrate onwhich the insulating layer is formed at said step (b) lies between saidsource region and said drain region.

In one embodiment, the step of forming an insulating member comprisesthe steps of: depositing a layer of insulating material on theinsulating layer; and patterning the insulating material to form saidinsulating member. The patterning process may involve in one embodimentboth lithography and etching processes.

In one embodiment of the present invention, the step of forming a spacerformation comprises the steps of: depositing a layer of insulatingmaterial over the insulating layer and insulating member; and performingan etching process to form the spacer formation. The etching process mayuse any appropriate etching type, such as dry etching, wet etching, etc.

Viewed from a third aspect, the present invention provides a lateraldouble diffused metal oxide semiconductor (LDMOS) device, comprising: asubstrate of a first conductivity type; a source region and a drainregion formed in the substrate, the source and drain regions being of asecond conductivity type opposite to said first conductivity type; aninsulating layer provided on a portion of the substrate between saidsource region and said drain region, such that a planar interface isprovided between said insulating layer and a surface of the substrate;an insulating member formed on a portion of said insulating layer; agate layer formed over part of said insulating member and saidinsulating layer; a first well region of said second conductivity typeformed in the substrate, one of said drain region and said source regionbeing formed inside said first well region; and the first well regionbeing located such that the portion of said insulating layer upon whichsaid insulating member is formed overlies the first well region.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be described further, by way of example only,with reference to embodiments thereof as illustrated in the accompanyingdrawings, in which:

FIG. 1 is a cross-sectional view of a conventional LDMOS device;

FIG. 2 is a cross-sectional view of an LDMOS device according to oneembodiment of the invention;

FIGS. 3A and 3B are flow charts illustrating process steps performed inone embodiment of the present invention in order to produce an LDMOSdevice; and

FIGS. 4A to 4D are cross-sectional diagrams schematically illustratingthe formation of the LDMOS device in accordance with the method of FIGS.3A and 3B.

DESCRIPTION OF EMBODIMENTS

According to one embodiment of the invention, an LDMOS device having alow on-resistance while exhibiting a high breakdown voltage is provided.As illustrated in FIG. 2, the LDMOS device 200 includes a P typesubstrate 202, which may for example be formed of single-crystalsilicon. An N-type well (NW) region 204 is then formed in the substrate202, and a first N-type doped region 206 is formed inside the N-wellregion 204 to form a drain region. A second N-type doped region 208 isformed in substrate 202 to form a source region.

An insulating layer 230 formed of, for example, silicon dioxide isprovided on the surface of the substrate between the source region 208and the drain region 206. This insulating layer has a planar interfacewith the surface of the substrate. On top of a portion of the insulatinglayer, an insulating member 212 is formed using a deposition process.The insulating member 212 protrudes above the level of the insulatinglayer 230 to provide a relatively thick insulating region, but by usingsuch a deposition process, the formation of this insulating member 212does not disrupt the planer interface between the insulating layer 230and the surface of the substrate 202. The insulating member 212 may beformed from a variety of materials, and for example may be formed from adielectric material such as silicon nitride, silicon oxynitride orsilicon enriched oxide. These materials are able to block UV-lightgenerated during a plasma process from penetrating to the device. In oneparticular embodiment, silicon nitride is used as the material for theinsulating member 212. FOX regions 220, 225 are provided at each side ofthe LDMOS device to isolate the device from other devices.

According to one embodiment of the invention, as illustrated in FIG. 2,the insulating member 212 is provided with another insulating member,such as a spacer formation 214 located at each side of the insulatingmember, this spacer being formed from an insulating material. Asexamples, the spacer 214 can be formed from silicon oxide, siliconnitride or silicon oxynitride, and in one particular embodiment siliconoxide is used. The spacer serves to provide a graduated transitionsurface between the insulating layer 230 and the insulating member 212.In an alternative embodiment, the spacer may be formed on only one sideof the insulating member 212.

A gate layer 210 is then formed over a portion of the insulating member212 and the insulating layer 230, with the transition surface of thespacer reducing the electric field present in the region of the gatetransitioning between the insulating layer and the insulating member.The gate layer can be formed of a variety of materials, and in oneembodiment it is formed of polysilicon or doped polysilicon.

In one embodiment, as shown in FIG. 2, a P-type well (PW) region 216 isformed in the substrate 202, and may be arranged to either enclose theNW region 204, or instead to be separated from the NW region. In oneembodiment, the PW region 216 encloses the first N-type doped region206, the second N-type doped region 208 and the NW region 204.

A method of fabricating the aforementioned LDMOS device will now bediscussed in more detail with reference to FIGS. 3A and 3B. It willappreciated by those skilled in the art that the dopant types of thevarious regions discussed earlier with reference to FIG. 2 can bechanged so as to produce P-type devices instead of N-type devices, andvice versa. Accordingly, for the purposes of FIGS. 3A and 3B, the terms“first conductivity type” and “second conductivity type” will be used.In the embodiment illustrated in FIG. 2, the first conductivity type isP-type and the second conductivity type is N-type.

At step 310, a substrate of a first conductivity type is provided, afterwhich at step 312 a first well region of a second conductivity type isformed in the substrate. Next, at step 314, a second well region of thefirst conductivity type is also formed in the substrate. These two wellregions can be formed using any one of a variety of known techniques,for example using lithography (masking the unwanted area) andimplantation (implanting to the wanted area). Further, the ordering ofthe formation of the two wells can be interchanged.

Next, at step 316, an insulating pattern is formed on the substratebetween regions where the first and second doped regions (i.e. sourceand drain regions) will later be formed. With reference to the earlierFIG. 2, this insulating pattern will be formed by the insulating layer230 and the insulating member 212 formed thereon, and accordingly willhave a flat bottom surface which provides a planar interface with thesurface of the substrate. The insulating member 212 can be provided onthe insulating layer 230 using, for example, a chemical vapourdeposition (CVD) process or any other general film formation processthat will ensure that the planar interface with the substrate ismaintained.

At step 318, another insulating member, such as a spacer, is formed onthe side walls of the insulating pattern, and more specifically on theside walls of the insulating member 212. A spacer may be produced byforming a film over the insulating pattern and the substrate, and thenapplying an etching back process in order to produce the spacers. Theetching back process may be performed using any appropriate etchingtechnique, for example a dry etching technique or a wet etchingtechnique.

Thereafter, at step 320, a gate layer is formed partially overlying theinsulating pattern and the substrate underneath the insulating pattern.The gate layer can be formed using any one of a number of knowntechniques in the art. For example, a doped polysilicon gate layer maybe formed using a thermal or Chemical Vapour Deposition (CVD) process.Then lithography is typically applied and finally an etching process isapplied, for example an anisotropic etching to pattern the gate.

Thereafter, a first doped region 206 is formed in the first well region204 at step 322, and at step 324 a second doped region 208 is formed inthe substrate. Both the first and second doped regions are of the secondconductivity type. Both steps 322 and 324 may be conducted throughconventional masking steps by selective doping of the substrate in therequired well region or doped region. The selective doping process maybe performed with any conventional method, such as diffusion and ionimplantation.

FIG. 3B is a flow diagram illustrating in more detail the processperformed in order to implement steps 316, 318 and 320 of FIG. 3A. Atstep 400, a gate oxide layer is formed over the first and second wellregions, and FOX regions 220 and 225 are formed at each end region ofthe gate oxide layer. The gate oxide layer may be formed using thermaloxidation or CVD, but thermal oxidation has been found to produce abetter quality gate oxide layer. The gate oxide layer is used to formthe thin insulating layer 230 described earlier with reference to FIG.2, and has an interface with the substrate that is planar over thelength between the source and drain region locations.

Thereafter, at step 410, an insulating member (in this particularexample a nitride layer) is formed on the gate oxide layer by depositionof the nitride layer, which is then patterned to form the insulatingmember 212. The deposition may be performed using a variety of knowntechniques, for example PECVD (Plasma enhancement chemical vapordeposition), SACVD (semi-atmosphere CVD), HDPCVD (high density plasmaCVD), etc. In one embodiment, the patterning process employs bothlithography and etching techniques in order to produce the insulatingmember from the deposited nitride. The etching may use either a dryetching process or a wet etching process, and in one particularembodiment dry etching is used.

Hence, it can be seen that both steps 400 and 410 are used to implementstep 316 of FIG. 3A.

Thereafter, the process proceeds to step 420, where an oxide isdeposited over the insulating member and exposed gate oxide, after whichan etch back process is used to form additional insulating members, suchas a spacer at each side of the insulating member 212. The etch backprocess in one embodiment employs a blank dry etching. Step 420 is henceused to implement step 318 of FIG. 3A.

At step 430, a poly layer is then deposited over the insulating member,spacers and exposed oxide layer, and the poly layer is then patterned toform the poly gate 210. Again, the patterning can be performed usinglithography and etching, as will be appreciated by those skilled in theart. Accordingly, step 430 is used to implement step 320 of FIG. 3A.

FIGS. 4A to 4D are cross-sectional diagrams illustrating the productionof an LDMOS device using the earlier-described method of FIGS. 3A and3B. FIG. 4A shows the formation of the N well 204 and P well 216 withinthe P-type substrate 202 in accordance with steps 312 and 314. As thenshown in FIG. 4B, a gate oxide layer 500 and two FOX regions 220 and 225are then produced on the surface of the substrate using thermaloxidation, as discussed earlier with reference to step 400 of FIG. 3B.

As then shown in FIG. 4C, the insulating member 212 and its associatedside walls 214 are then formed on the gate oxide layer 500 usingdeposition processes, as described earlier with reference to steps 410and 420 of FIG. 3B.

Finally, as shown in FIG. 4D, the polygate 210 is formed usingdeposition and etching, and the source and drain regions 208, 206 areformed using a selective doping process (see steps 320, 322 and 324 ofFIG. 3A). The portions of the gate oxide layer 500 overlying the sourceand drain region locations will typically be retained as a sacrificialoxide during formation of the source and drain regions, and will then beremoved after implantation to form the source and drain regions. Aninsulating layer 230 is then left on the surface of the substratebetween the source and drain regions 208, 206.

In a conventional LDMOS device, where a FOX region is placed beneath thefield plate, a recess current path is found to exist due to the currentneeding to deviate to follow the contour of the lower surface of the FOXlayer. Further, when that current path changes from the underside of thethin insulating layer to the underside of the FOX layer, the currentspreading resistance increases, and both of these factors cause anincrease in the on-resistance (Ron). In order to decrease the Ron, thedoping concentration along the current path could be increased, but thiswould degrade the breakdown characteristic by reducing the breakdownvoltage. However, in accordance with embodiments of the presentinvention, the FOX is replaced with an insulating member, and optionallyadditional insulating member (e.g. spacer) formation, and this helpsmaintain the high breakdown voltage, while also allowing the Ron to bedecreased (and hence the saturation current (Idsat) to be increased) dueto the flat current path that results from such an approach.

Accordingly, better device performance can be achieved due to the flatcurrent path, and the flat current path can be achieved using a simplefabrication process, wherein the usual FOX under field plate is replacedby an insulating member and optionally an additional insulating member(e.g. spacer). Such a structure can be modified having regard torequired breakdown considerations without influencing the isolation.

The LDMOS devices of embodiments of the present invention may be used ina variety of high voltage applications, such as in integrated circuitsrequiring the sustaining of high voltage breakdown, for example an LCDdriver.

Although a particular embodiment of the invention has been describedherein, it will be apparent that the invention is not limited thereto,and that many modifications and additions may be made within the scopeof the invention. For example, various combinations of the features ofthe following dependent claims could be made with the features of theindependent claims without departing from the scope of the presentinvention.

1. A lateral double diffused metal oxide semiconductor (LDMOS) device,comprising: a substrate; a source region and a drain region formed inthe substrate; an insulating layer provided on a portion of thesubstrate between said source region and said drain region, such that aplanar interface is provided between said insulating layer and a surfaceof the substrate; a first insulating member formed on a portion of saidinsulating layer; a second insulating member formed on another portionof said insulating layer; and a gate layer formed over part of saidfirst insulating member, said second insulating member, and saidinsulating layer.
 2. An LDMOS device as claimed in claim 1, wherein saidfirst insulating member is formed by deposition.
 3. An LDMOS device asclaimed in claim 1, wherein the second insulating member is locatedadjacent to at least one side wall of the first insulating member toform a transition surface for the gate layer between the insulatinglayer and the first insulating member.
 4. An LDMOS device as claimed inclaim 1, wherein said substrate is of a first conductivity type, andsaid source region and said drain region are of a second conductivitytype opposite to said first conductivity type, the device furthercomprising: a first well region of said second conductivity type formedin the substrate, one of said drain region and said source region beingformed inside said first well region; and the first well region beinglocated such that the portion of said insulating layer upon which saidfirst insulating member is formed overlies the first well region.
 5. AnLDMOS device as claimed in claim 4, further comprising: a channel regionformed in the substrate below the insulating layer; and a second wellregion of said first conductivity type formed in the substrate toprovide a doping concentration for said channel region.
 6. An LDMOSdevice as claimed in claim 5, wherein said second well region surroundsthe first well region.
 7. An LDMOS device as claimed in claim 1, whereinsaid insulating layer is formed of silicon dioxide.
 8. An LDMOS deviceas claimed in claim 1, wherein the first insulating member comprises adielectric material.
 9. An LDMOS device as claimed in claim 8, whereinsaid dielectric material is one of silicon nitride, silicon oxynitrideand silicon enriched oxide.
 10. An LDMOS device as claimed in claim 1,wherein insulating material of the second insulating member is one ofsilicon oxide, silicon nitride and silicon oxynitride.
 11. An LDMOSdevice as claimed in claim 3, wherein the first insulating member isformed of silicon nitride and the second insulating member is formed ofsilicon oxide.
 12. A lateral double diffused metal oxide semiconductor(LDMOS) device, comprising: a substrate of a first conductivity type; asource region and a drain region formed in the substrate, the source anddrain regions being of a second conductivity type opposite to said firstconductivity type; an insulating layer provided on a portion of thesubstrate between said source region and said drain region, such that aplanar interface is provided between said insulating layer and a surfaceof the substrate; a first insulating member formed on a portion of saidinsulating layer; a second insulating member formed on another portionof said insulating layer; a gate layer formed over part of saidinsulating member, said second insulating member, and said insulatinglayer; a first well region of said second conductivity type formed inthe substrate, one of said drain region and said source region beingformed inside said first well region; and the first well region beinglocated such that the portion of said insulating layer upon which saidinsulating member is formed overlies the first well region.